JPH0421556U - - Google Patents
Info
- Publication number
- JPH0421556U JPH0421556U JP6092490U JP6092490U JPH0421556U JP H0421556 U JPH0421556 U JP H0421556U JP 6092490 U JP6092490 U JP 6092490U JP 6092490 U JP6092490 U JP 6092490U JP H0421556 U JPH0421556 U JP H0421556U
- Authority
- JP
- Japan
- Prior art keywords
- sputtering
- holder
- cryostat
- sputtered
- sputtering device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004544 sputter deposition Methods 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 8
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 4
- 239000007788 liquid Substances 0.000 claims description 3
- 239000011810 insulating material Substances 0.000 claims description 2
- 229910052757 nitrogen Inorganic materials 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims 1
- 239000003507 refrigerant Substances 0.000 claims 1
- 239000002245 particle Substances 0.000 description 3
- 238000001816 cooling Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6092490U JPH0421556U (en]) | 1990-06-08 | 1990-06-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6092490U JPH0421556U (en]) | 1990-06-08 | 1990-06-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0421556U true JPH0421556U (en]) | 1992-02-24 |
Family
ID=31588718
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6092490U Pending JPH0421556U (en]) | 1990-06-08 | 1990-06-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0421556U (en]) |
-
1990
- 1990-06-08 JP JP6092490U patent/JPH0421556U/ja active Pending
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